patentipc/H01L21-3065

http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065

Outgoing Links

Predicate	Object
title	Plasma etching; Reactive-ion etching
label	H01L21/3065
sameAs	http://www.wipo.int/classifications/ipc/ipcpub/?notion=scheme&symbol=H01L0021306500 http://data.epo.org/linked-data/def/ipc/H01L21-3065
broader	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306

Incoming Links

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