| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D04B15-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D04B15-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D04B15-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D04B15-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B69-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D04B9-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D04B15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A41B11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D04B15-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D04B9-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8247
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2004-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2011-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4803975-B2 |
| titleOfInvention |
Method for forming element isolation film of semiconductor element |
| priorityDate |
2004-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |