| abstract |
Compact microwave downstream plasma systems include power supplies, microwave generators, non-linear waveguides, circulators, dummy loads, plasma applicators and igniters in a fairly small portable housing unit. The microwave generator feeds microwaves into the guide to the applicator. The guide includes several curve regions that allow for a more compact design. The applicator generates a plasma and is configured to output a reactant that can be used to remove the photoresist layer from the wafer in the processing reactor. |