| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C24-04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C24-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2020-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2022522752-A |
| titleOfInvention |
Laminated aerosol deposits for aluminum components for plasma processing chambers |
| abstract |
An apparatus suitable for use in a plasma processing chamber is provided. An aluminum body having at least one surface is provided. The aluminum oxide-containing aerosol deposit is placed on at least one surface of the aluminum body. The yttrium-containing aerosol deposit is placed on the aluminum oxide-containing aerosol deposit. [Selection diagram] FIG. 2C |
| priorityDate |
2019-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |