http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4839506-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2000-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4839506-B2 |
| titleOfInvention | Dry etching method |
| priorityDate | 2000-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.