http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8993449-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_baf4fba790d830eb21008e5d783628dd http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc3e639586089fe232d0cfb27383c875 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_56fafea7dd01afeda4b03c2b66c89cf1 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 2010-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_116152cbd1675029e1c3bace0ec61960 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7982287e6375045fb16eab167014d466 |
| publicationDate | 2015-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8993449-B2 |
| titleOfInvention | Etching method |
| abstract | There is provided an etching method which can form trenches or via holes having desired aspect ratios and shapes in a to-be-processed object made of silicon. The etching method includes: a hydrogen halide-containing gas-based etching step of etching a silicon substrate by introducing a hydrogen halide-containing gas into a vacuum chamber; a fluorine-containing gas-based etching step of etching the silicon substrate by introducing a fluorine-containing gas into the vacuum chamber; a protective film formation step forming a protective film on the silicon substrate by sputtering a solid material; and a protective film removal step of removing part of the protective film by applying radio frequency bias power to a substrate electrode. The fluorine-containing gas-based etching step, the protective film formation step, and the protective film removal step are repeatedly performed in this order. |
| priorityDate | 2009-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.