http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2763172-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-00 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-00 |
filingDate | 1990-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1998-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1998-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2763172-B2 |
titleOfInvention | Diamond thin film etching method |
priorityDate | 1990-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.