| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2021-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d817f745c7f23f9535e5b0201d131f3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5353149191fad9f7f07fe688f8514b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe6ebb6ee1da98e362f83b7dec94834e |
| publicationDate |
2021-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-113380599-A |
| titleOfInvention |
Plasma treatment method |
| abstract |
The present invention relates to a plasma treatment method. [Problem] Consumption of components in a chamber is suppressed and process stabilization is achieved. [Solution] A plasma processing method for performing plasma processing on a substrate, the plasma processing method including a step of plasmaizing a first gas containing carbon and hydrogen in a chamber , the step of coating the surface of the member in the chamber with the film having conductivity; the step of carrying the substrate into the chamber; and, in the state where the surface of the member in the chamber is coated with the film having conductivity, in A process of treating the substrate by plasma-forming the second gas in the chamber. |
| priorityDate |
2020-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |