http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3271518-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate | 1996-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3271518-B2 |
| titleOfInvention | Method for manufacturing semiconductor device |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10126068-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10077952-B2 |
| priorityDate | 1996-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.