http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3661851-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2001-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3661851-B2 |
| titleOfInvention | Dry etching method and dry etching apparatus |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101397223-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9420697-B2 |
| priorityDate | 2001-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.