http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0136578-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d91b2f9432de1bcf3290473f7a3e96c
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
filingDate 2000-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6458a3abf1e0b6e3a9e1b71c3a24d845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3134fe3b3455d58d4443e1d09ea2f4b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42f5ddfe55449172ce473ff88094037f
publicationDate 2001-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-0136578-A1
titleOfInvention Non-corrosive cleaning composition for removing plasma etching residues
abstract A non-corrosive cleaning composition for removing residues from a substrate. The composition comprises: (a) water; (b) at least one hydroxylammonium compound; (c) at least one basic compound, preferably selected from the group consisting of amines and quaternary ammonium hydroxides; (d) at least one organic carboxylic acid; and (e) optionally, a polyhydric compound. The pH of the composition is preferably between about 2 to about 6.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010075120-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009081445-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2305788-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7935665-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I491729-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9068153-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1688798-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2206766-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8241428-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003100867-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2586855-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4583678-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007110720-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1501916-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1501916-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005532423-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7396806-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9726978-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103975052-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1310989-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1310989-A4
priorityDate 1999-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5895781-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5780406-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6030932-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226597250
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129810593
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17911773
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413464
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57473079
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394558
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10401
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226429854
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19463
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7618
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10690
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID259994
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21218424
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7360
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227472655
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395393
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128018321
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394006
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66854
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6509
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11288
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18179246
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127563749
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412055
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87216763
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128637022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129572464
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394435
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66632215
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129721338
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75897
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7361
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12431
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7677
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226597249
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129541256
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127759454
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226408370
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393853
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID289
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1017
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15869812
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161658
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226401586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226417604
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127602502
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID338
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129377289
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405416
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127746476
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127904138

Total number of triples: 108.