patent/JP-3631269-B2

Predicate	Object
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
filingDate	1994-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2005-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	2005-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	JP-3631269-B2
titleOfInvention	Excited oxygen supply method
priorityDate	1993-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24823 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457623688 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559478 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5416 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569951 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977

Total number of triples: 19.