http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003332241-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2002-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a65d59aa48cdeac764baa5c454b69768 |
| publicationDate | 2003-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003332241-A |
| titleOfInvention | Microwave plasma processing apparatus, microwave plasma processing method and structure manufacturing method |
| abstract | PROBLEM TO BE SOLVED: To provide a microwave plasma processing apparatus, a microwave processing method, and a method of manufacturing a structure capable of easily causing discharge in a wide range of conditions by limiting reflected power. When a desired power is supplied from a microwave power supply into a plasma processing chamber, a microwave introduced into an endless annular waveguide (118) via a reflection limiting slot (110) is distributed right and left by an E branch (111). Propagated. The distributed microwaves interfere with each other, and an “antinode” of the standing wave 112 is generated every half of the guide wavelength. The dielectric window 1 is inserted through a slot 113 provided so as to cross the surface current. Microwaves are introduced into the plasma processing chamber through the plasma processing chamber 07. Although a part of the microwave incident into the endless annular waveguide 118 returns to the power supply direction as a reflected component, the reflection-restricted slot 110 limits the reflection-side power to less than half of the incident-side power. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017330727-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10553401-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012133441-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006118042-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2006118042-A1 |
| priorityDate | 2002-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.