| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32963
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2007-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9f24bc708b1b28dc8709aaab3d2f171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c7a29ad8f1407552682511a55ba974e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e60bc66b217f664df01e2b9b46905dfa |
| publicationDate |
2009-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009054818-A |
| titleOfInvention |
Plasma processing apparatus, plasma processing method, and end point detection method |
| abstract |
PROBLEM TO BE SOLVED: To accurately detect an end point in plasma processing. A plasma processing apparatus 100 measures the integrated value of the number of particles of active species in plasma that moves toward a target object (wafer W) and plasma generation means that generates plasma in a chamber 1. And a control unit 50 that controls the plasma processing to be terminated when the integrated value of the measured number of particles reaches a set value. The measurement unit 60 measures the number of active species by irradiating a predetermined laser beam from the light source unit 61 toward the plasma, and receiving the light by the detection unit 63 including a VUV monochromator. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012054338-A |
| priorityDate |
2007-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |