http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
Outgoing Links
| Predicate | Object |
|---|---|
| concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| level | 12^^<http://www.w3.org/2001/XMLSchema#integer> |
| symbol | H01L21/31 |
| modified | 2021-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| title | Treatment of semiconductor bodies using processes or apparatus not provided for in groupsH01L21/20-H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers |
| type | http://data.epo.org/linked-data/def/cpc/SubGroup |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30 |
Incoming Links
Total number of triples: 7455.