Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76828 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate |
1992-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1996-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe7e0693e8b3de91658439802d9cfe3f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_602e0ecd2274299ec4c6e72e9face3e5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcc4e6bde7d2b91070bc4a1d19701ef2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_492435c8d9f53f8871f28b94dd08c9db http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8aa283b5b32ce9e3ee1be4629f0f1a2a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eaac87cf3f11d32565f00923c665d38c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0168ff3d38a36ea3617fc0724da92f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c97bc2205dde621487ae69e1335701c |
publicationDate |
1996-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-960002073-B1 |
titleOfInvention |
Manufacturing Method of Semiconductor Device |
abstract |
No content. |
priorityDate |
1992-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |