| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ba27c0a773c07a0a0a5c6afcabc674ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_15f32411d7de6ad4737cbbe12b124751
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dafe58e8325eff57c8d830ad27f86482
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 |
| filingDate |
2011-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6b003674fcca83a1995127c66737bea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c647f255c48353eba859e20adf9405a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30d26070d32250bdba6d687a4b719e90 |
| publicationDate |
2012-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012164844-A1 |
| titleOfInvention |
Method and apparatus for forming oxide film on carbon film |
| abstract |
A method for forming an oxide film on a carbon film includes the steps of forming a carbon film on an object to be processed; forming an object-to-be-oxidized layer on the carbon film; and forming an oxide film on the object-to-be-oxidized layer while oxidizing the object-to-be-oxidized layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9865459-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016314960-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014187025-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I743035-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8945339-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9293323-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012103518-A1 |
| priorityDate |
2010-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |