| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1055954e320928267f3f13c33e5cc872 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-291
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29 |
| filingDate |
1990-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8665e68dba058ee467081148423d1e57 |
| publicationDate |
1991-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
GB-2235444-A |
| titleOfInvention |
A method of producing insulating layers |
| abstract |
Comprises spinning a film of spin-on-glass (SOG) over a semiconductor substrate, precuring the film of SOG at an elevated temperature sufficient to remove the bulk of solvent and curing the film of SOG in a plasma in a plasma reactor of a type exhibiting a self-biased RF discharge adjacent to the SOG for a period of time sufficient to exclude the bulk of SiOH, organic volatiles and H2O from the layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1703328-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1703328-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6544858-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2308735-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2322734-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7727902-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I383263-B |
| priorityDate |
1989-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |