Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_edc7ad06ab91150c5556ccaa5b0a5185 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-09701 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1031 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7681 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76808 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76829 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76835 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-469 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L- http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-24 |
filingDate |
2003-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2006-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f622f99bf5a0102b366aaa33663cf676 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50992dc95bd1ba3278406de4f8c0df0a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fb5421759602e7b721e361997868bfc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffa7ceba42b3936967d4c17473513e8b |
publicationDate |
2006-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-7060634-B2 |
titleOfInvention |
Materials and methods for forming hybrid organic-inorganic dielectric materials for integrated circuit applications |
abstract |
An integrated circuit is provided comprising a substrate and discrete areas of electrically insulating and electrically conductive material, wherein the electrically insulating material is a hybrid organic-inorganic material that has a density of 1.45 g/cm 3 or more and a dielectric constant of 3.0 or less. The integrated circuit can be made by a method comprising: providing a substrate; forming discrete areas of electrically insulating and electrically conductive material on the substrate; wherein the electrically insulating material is deposited on the substrate followed by heating at a temperature of 350° C. or less; and wherein the electrically insulating material is a hybrid organic-inorganic material that has a density of 1.45 g/cm 3 or more after densification. Also disclosed is a method for making an integrated circuit comprising performing a dual damascene method with an electrically conductive material and a dielectric, the dielectric being a directly photopatterned hybrid organic-inorganic material. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8234606-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7968975-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10544329-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8557877-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008153296-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7501353-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006199301-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011185330-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8784985-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8864898-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8642246-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010032809-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8992806-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7332822-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006103029-A1 |
priorityDate |
2002-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |