| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S428-901
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-09701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24917 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49894
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-498
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
| filingDate |
1997-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf82378761d420273085726cd2c2e23c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a85752c66dbc7a6741c1313b400255eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c532e1e1b32a5ebd47359b7667fbfd13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_287a4e5bedf8c745758b9123e6f94e15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8741f78bfe010354eeff283c1081eb84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_228dd36f5e9580b5d86070ac7f003d87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a29acea57d89d336e5ab2522d59a99e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3197992ce39580e9358404f6c49a986f |
| publicationDate |
2000-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0838853-A3 |
| titleOfInvention |
Integrated circuit device and process for its manufacture |
| abstract |
The invention relates to an integrated circuit device comprisingn(i) a substrate; (ii) metallic circuit lines positioned on the substratenand (iii) a dielectric material positioned on the circuit lines. Thendielectric material comprises the reaction product of an organicnpolysilica and polyamic ester preferably terminated with an alkoxysilylnalkyl group. |
| priorityDate |
1996-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |