patent/EP-0881678-A3

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0881678-A3

Outgoing Links

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filingDate	1998-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f646721cc883683fdbfdcf610d5dea5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b2e206987fb6c0e546596b99c81381b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa3e8101d10331ec86471ba1b781e2b9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43482adf579675b55662390605365f38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_120975142dea60ffc45d30945aa6ef52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17ed4dfefb6c46b1dcfda3ffb125f8e6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84a864fbb2a7858997dbacda9798b1d6
publicationDate	2000-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	EP-0881678-A3
titleOfInvention	Improvements in or relating to porous dielectric structures
abstract	A surface treatment for porous silica to enhance adhesionnof overlying layers. Treatments include surface groupnsubstitution, pore collapse, and gap filling layer (520) whichninvades open surface pores (514) of xerogel (510).
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8557877-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8784985-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8864898-B2
priorityDate	1997-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Subject

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5548159-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0688052-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5076980-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5561318-A

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http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129195467
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13838
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127840924
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758

Total number of triples: 64.