abstract |
Provided is a plasma-resistant member comprising: a substrate; a surface layer formed on the surface of the substrate, comprising a cerium oxide polycrystal, a layer structure having a plasma resistance, and a cerium oxide polycrystal constituting the layer structure The contained crystallites are not mutually hetero-transmissive, and the cerium oxide polycrystal constituting the layered structure has a crystal structure containing only a cubic crystal, or a crystal structure in which a cubic crystal and a monoclinic crystal are mixed, and constitutes the layered structure. The average value of the ratio of the monoclinic crystal to the cubic crystal in the cerium oxide polycrystal is 60% or less larger than 0%. [representative map] |