| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76825
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate |
2010-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78450bdcb4a39e3cf81db1d15e3252b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fd5d3b6b6fdb1abe6c0d840d20a0c9d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef9adf3efa36080c6173824fa2c409af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca78dc6711c45b55afd2391a4544809c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31430dc109612fd97a27f1d569b1326d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbc96389b697d6629e8eb2d7890f4b65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70280780c762f84c88cc29a54c8a6493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30f0961bbb8c1bf6b47a59adf85bde98
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e7fdb16485259bce3b43ef57a1d4c7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c96f14232a0f0e892863f59bce115830
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c798297ceb64487c76c84c554456aa34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_809a0918fa9d4bbdfd56234e549d34f9 |
| publicationDate |
2015-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I489549-B |
| titleOfInvention |
Low dielectric constant dielectric layer etching method capable of reducing damage |
| priorityDate |
2009-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |