| abstract |
It has a step of preparing a substrate having an oxide film formed on the surface, a step of pre-treating the surface of the oxide film, and forming a carbon-containing material on the surface of the oxide film after the pre-treatment by the following treatments The process of the nitride film, that is, a predetermined number of cycles in which the following processes are not simultaneously performed: a process of supplying a raw material gas to the substrate, a process of supplying a carbon-containing gas to the substrate, and a process of supplying a carbon-containing gas to the substrate. a step of supplying a nitrogen-containing gas; or a predetermined number of cycles in which the following steps are not simultaneously performed: a step of supplying a raw material gas to the substrate, and a step of supplying a gas containing carbon and nitrogen to the substrate; or A cycle of non-simultaneously performing the following steps: the step of supplying the carbon-containing raw material gas to the substrate and the step of supplying the nitrogen-containing gas to the substrate are performed a predetermined number of times. |