| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_782b276beee7c34efe50183392517dfb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 |
| filingDate |
1997-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d989df59952fc934f5a384872608d0da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d069a16130653a542e720f6d6257d83c |
| publicationDate |
1998-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-19746425-A1 |
| titleOfInvention |
Helicon wave excitation for generating high-energy electrons for the production of semiconductors |
| abstract |
The method involves generating energy rich electrons, and charging the insulator exposed surface. The energy rich electrons are generated by a helicon plasma source with a plasma tube with (12) an encapsulated end (16), an aerial (18) surrounding the tube outside and supplied from HF power source. The aerial forms a helicon wave (22) within the plasma, emitted from the tube other end. Magnetic fields are generated within the plasma by electromagnetic coils. The helicon plasma source comprises controls for the helicon source and for the stream of high energy electrons, carried by the helicon wave. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19918790-A1 |
| priorityDate |
1996-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |