http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201133650-A

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filingDate 2011-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2011-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201133650-A
titleOfInvention Oxide terminated trench mosfet with three or four masks
abstract An oxide termination semiconductor device may comprise a plurality of gate trenches, a gate runner, and an insulator termination trench. The gate trench are located in an active region. Each gate trench includes a conductive gate electrode. The insulator termination trench is located in a termination region that surrounds the active region. The insulator termination trench is filled with an insulator material to form an insulator termination for the semiconductor device. The device can be made using a three mask or four mask process.
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