http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019159851-A1
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-37 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-914 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-921 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-56 |
filingDate | 2019-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2021-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-WO2019159851-A1 |
titleOfInvention | Metal carbide sintered body and heat-resistant member for silicon carbide semiconductor manufacturing equipment provided with it |
abstract | [Problem] A metal having a high relative density and excellent mechanical strength, which can be produced in a carbide sintered body of a metal having a very high melting point without sintering under high pressure such as hot pressing or HIP. A carbide sintered body is provided. [Means] A carbide sintered body of at least one metal selected from the group consisting of Group 4 and Group 5 elements of the periodic table, which contains Si elements of 0.1 wtppm or more and 10,000 wtppm or less. A metal carbide sintered body. |
priorityDate | 2018-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.