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filingDate 2019-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-WO2019159851-A1
titleOfInvention Metal carbide sintered body and heat-resistant member for silicon carbide semiconductor manufacturing equipment provided with it
abstract [Problem] A metal having a high relative density and excellent mechanical strength, which can be produced in a carbide sintered body of a metal having a very high melting point without sintering under high pressure such as hot pressing or HIP. A carbide sintered body is provided. [Means] A carbide sintered body of at least one metal selected from the group consisting of Group 4 and Group 5 elements of the periodic table, which contains Si elements of 0.1 wtppm or more and 10,000 wtppm or less. A metal carbide sintered body.
priorityDate 2018-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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