| abstract |
The base material and the layered structure formed on the surface of the said base material containing the yttria polycrystal, and having plasma resistance, and the crystallites contained in the yttria polycrystal which constitute the layered structure are not bonded through the above. The yttria polycrystal constituting the layered structure has a crystal structure containing only cubic crystals or a crystal structure in which cubic crystals and monoclinic crystals are mixed, and monoclinic crystals for cubic crystals in the yttria polycrystals constituting the layered structure are defined. The average value of a ratio is larger than 0%, and is 60% or less, The plasma-resistant member characterized by the above-mentioned. |