| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 |
| filingDate |
2012-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b15b27323ed7197ce42c33b5a868e5c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4afd08dad87cf29c5011baadb47d2991
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8763cad81ebd0af5f500f307648b0f18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50e84e6749e12e9bccf318a49a1e3935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c04ded4d9acf83116c9a82653bd6cc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa70862fdb19aa7b23eb104e048510a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d542da13677d648de63861844015c4f |
| publicationDate |
2016-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I535881-B |
| titleOfInvention |
Method for forming a hafnium carbonitride film |
| priorityDate |
2011-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |