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filingDate 2002-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2003-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200305618-A
titleOfInvention Process for producing dielectric layers by using multifunctional carbosilanes
abstract A process for producing dielectric layers with low dielectric constants by thermal treatment of a sol-gel product of a multifunctional carbosilane, corresponding layers, and their use in the production of electronic components, are described.
priorityDate 2001-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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