abstract |
According to an embodiment of the present invention, an assessment method is provided. The assessment method involves assessing the progress of a treatment of a by-product produced in a process for reacting a substance containing silicon and a halogen, or reacting a substance containing silicon and a substance containing a halogen. The treatment of the by-product includes bringing a water-containing treatment solution into contact with the by-product to obtain a first solid. The assessment method includes assessing the progress of the treatment of the by-product on the basis of a signal obtained by chemical analysis of Si-α bonding (where α is at least one element selected from the group consisting of F, Cl, Br, and I) and/or Si-H bonding, with respect to the first solid. |