| abstract |
Provided is a container for volatile raw materials, which has excellent corrosion resistance. A container 100 for volatile raw materials, which can be used for the storage and evaporation of a metal halogen compound S for thin film formation use, the container 100 being provided with a container main body 2 having a container wall 12, a lid body 4 having a carrier gas inlet port 16 and a mixed gas discharge port 18, a fastening member 6 for fastening the container main body 2 and the lid body 4, and a fitting member 8, wherein the container wall 12 in the container main body 2 is composed of copper having purity of 99 to 99.9999%, aluminum having purity of 99 to 99.9999% or titanium having purity of 99 to 99.9999%, and each of the container main body 2, the lid body 4, the fastening member 6 and the fitting member 8 is subjected to the coating with a fluororesin and/or electrolytic polishing. |