| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-4757 |
| filingDate |
2007-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79465538fdad1e5155869f351d42a1cc |
| publicationDate |
2010-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010062612-A1 |
| titleOfInvention |
Aftertreatment Method for Amorphous Carbon Film |
| abstract |
The present invention is an aftertreatment method further applied to an amorphous carbon film to which a treatment including heating is performed after the film has been formed on a substrate. The treatment of preventing oxidation of the amorphous carbon film is performed immediately after the treatment including heating. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010304014-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11437230-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I496193-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999734-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8399366-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012031266-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8936829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105990237-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8597401-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015380296-A1 |
| priorityDate |
2006-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |