| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0534e551838bc80048214c5c27970d07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a83d552a7a5b9168d523356444fee094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fbf7048e58f67a1e67063e95f3e95f9c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a14ef511c024661e8ef1d0a54f36377 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02359 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2010-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c78018d8cc59fbc577831b6666078d70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24b59aa355c9f7ddf72bd85968b5283d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f300b14368ba10a7738617969acb161 |
| publicationDate |
2015-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8999734-B2 |
| titleOfInvention |
Cyclic amino compounds for low-k silylation |
| abstract |
Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed. |
| priorityDate |
2009-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |