| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76808
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
2009-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79465538fdad1e5155869f351d42a1cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad99986e1cdbf513d9be5f670bac23c6 |
| publicationDate |
2011-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011053375-A1 |
| titleOfInvention |
Method for processing amorphous carbon film, and semiconductor device manufacturing method using the method |
| abstract |
A method for processing an amorphous carbon film which has been formed on a substrate and wet-cleaned after being dry-etched includes preparing the substrate having the wet-cleaned amorphous carbon film and modifying a surface of the amorphous carbon film, before forming an upper layer on the wet-cleaned amorphous carbon film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999734-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8927436-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130084918-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11018017-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014338744-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101973077-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8524329-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9305771-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015179463-A1 |
| priorityDate |
2008-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |