http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-527683-B

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filingDate 2001-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2003-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c57adc9b6d517f8d52e41476b045ca32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_512c1913f20a9e841ce36fa753dbb1c2
publicationDate 2003-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-527683-B
titleOfInvention Formation method of dielectric film
abstract A formation method of dielectric film is provided. It comprises a formation step to form an dielectric layer, and a film quality changing step to change the film quality by exposing the dielectric film in the atomic type oxygen O* and hydrogen nitride N* plasma accompanying with Kr or Ar inert gas.
priorityDate 2000-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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