| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c0f8dc752059a228fada0efdcc2901b9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2111-00844 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-4966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-05 |
| filingDate |
1997-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bcf14a57385219a0ac70c6dc5ab5cf1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51c47b340295a0d44d1c331e8ea2bd31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7c42fb75b3ab5a33c35a183931f1f84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55894e3c320ebc168512d06d3d0da0e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0b708160c0c226949c794f80e228b20 |
| publicationDate |
1998-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10279687-A |
| titleOfInvention |
Composition for forming electrically insulating thin film and method for forming electrically insulating thin film |
| abstract |
(57) [Problem] To provide an insulating film forming composition capable of forming an insulating film having a low relative dielectric constant. SOLUTION: (A) Inorganic or organic resin and (B) (A) It is characterized by comprising a solvent capable of dissolving the component (A) and two or more solvents having different boiling points or vapor pressure curves from the component (a) and the affinity of the component (A) to the resin. A composition for forming an electrically insulating thin film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-94746-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6451381-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100847917-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6764718-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010528453-A |
| priorityDate |
1997-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |