| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2343-04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F230-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F230-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L43-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
| filingDate |
2007-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6960d19a093ee6b0fb86cdf2fc1acee1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a6f1025bf9cab2bf1565e2de058e734 |
| publicationDate |
2008-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008214454-A |
| titleOfInvention |
Insulating film forming composition |
| abstract |
PROBLEM TO BE SOLVED: To form a film having an appropriate uniform thickness suitable for use as an interlayer insulating film in a semiconductor element device and the like, and for forming an insulating film excellent in film characteristics such as dielectric constant and Young's modulus A composition is provided. SOLUTION: A cage-type silsesquioxane compound having two or more unsaturated groups as a substituent is dissolved in an organic solvent at a concentration of 12% by mass or less, and the compound is polymerized using a polymerization initiator. In addition, 70% or more of the compound contains a polymer undergoing a polymerization reaction, and an azo compound is preferable as the polymerization initiator. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5664828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I498344-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8530583-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010067683-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013187507-A1 |
| priorityDate |
2007-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |