| abstract |
The present invention is a plasma treatment detection indicator that changes color by plasma treatment, which exhibits excellent thermal resistance while suppressing the dispersal of fine fragments of the color-changing layer due to gasification of the color-changing layer or plasma treatment to such an extent that it does not affect the characteristics of electronic devices provides In particular, it includes a color-changing layer that changes color by plasma treatment, wherein the color-changing layer is a simple material in the form of at least one metal element selected from the group consisting of Mo, W, Sn, V, Ce, Te, and Bi; Or Mo, W, Sn, V, Ce, Te, and provides a plasma treatment detection indicator including an inorganic compound including at least one metal selected from the group consisting of Bi. |