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filingDate 2000-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2002-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6b7217744d3ea65d2eb5d048f0ae1ec
publicationDate 2002-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-479286-B
titleOfInvention Method for forming an interlayer insulating film
abstract A method for forming an interlayer insulating film is disclosed. This method comprises the steps of: forming a first insulating film on an object to be formed, the film containing one selected from at least H2O, C and a hydrocarbon; forming a first insulating film having porosity by performing heat treatment for the first insulating film to discharge H2O, C or hydrocarbon therefrom; and forming a second insulating film on the first insulating film having porosity.
priorityDate 1999-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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