| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_10636948adeff7a4f9c77a5c45be2245 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-00 |
| filingDate |
2011-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96d71dc5190a51c21f391d7a1cf33ff6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f695cc40a6ed6f7bd2dec329eeaa9a96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62978fe5c3070efdac6e73873bbd218d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbbea04184eab1a9438d3c8cdcf18ac0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23ecec66cef96a925423e335fe8b746a |
| publicationDate |
2013-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2608900-A1 |
| titleOfInvention |
Chemical vapor deposition chamber cleaning with molecular fluorine |
| abstract |
Methods and apparatus for the cleaning PECVD chambers that utilize molecular fluorine as the cleaning material. |
| priorityDate |
2010-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |