| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2fb272959740a2231f287ac6bf4d190a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6733
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68764
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2018-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0aeb97e59c012a398970983a13612d8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ece0c026cf3fb75ba35a07e1fe6a3e1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85e817bdb7e7a5a6058f0ee1c1043c91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0d74e9d45d20e0b7bac7c1b110f4383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da1f1d2a74f33228972a7fb6d948cc78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_912c2e9db3eb6de90ccbe26f35e34fe9 |
| publicationDate |
2020-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I694518-B |
| titleOfInvention |
Substrate processing device, quartz reaction tube, cleaning method and recording medium |
| abstract |
Disclosed is a substrate processing apparatus using a double tube reactor having improved exhaust performance. The reactor tube has an exhaust port communicating with an exhaust space between the outer tube and the inner tube, a first exhaust opening (4E) provided in the inner tube for discharging the process gas, second exhaust openings (4H, 4J) allowing fluid communication between a space inside the exhaust space and a manifold, and third exhaust openings (4G) passing through the inner pipe at a location facing the heat insulating assembly. The second exhaust openings accelerates exhaust of the gas staying far from the first exhaust opening in the exhaust space. |
| priorityDate |
2017-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |