| abstract |
The present invention provides a method capable of homogeneously sealing a fine groove with a siliceous material. The process according to the present invention comprises a solution of perhydropolysilazane having a polystyrene reduced weight average molecular weight in the range of 3,000 to 20,000, having at least one groove having a width of the deepest portion of 0.2 μm or less and a ratio of depth to width of 2 or more. The groove is sealed with the perhydropolysilazane by coating and drying on a substrate, and then the perhydropolysilazane is converted into a siliceous material by heating the perhydropolysilazane in an atmosphere containing water vapor. It is characterized by. n n Silica material, landfill, perhydropolysilazane, polystyrene equivalent weight average molecular weight |