| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8205ec6ee1cd95eb60a03826535bad97 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D71-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F299-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D71-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F299-024 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-30 |
| filingDate |
2021-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_878ada85d343014ab0699c2d17a36bfe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bb3457d8bbd4f852c18e804f65cee03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b41b0648d0a03d2954be68236c3403da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee3e8b084f7299eaac66117d7aa82dce |
| publicationDate |
2021-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2021241594-A1 |
| titleOfInvention |
Vertically phase-separated block copolymer layer |
| abstract |
Provided are: a layer including a block copolymer in which a microphase-separated structure of the block copolymer has been induced perpendicular to a substrate, this process being difficult in heating under atmospheric pressure; a method for producing the layer; and a method for producing a semiconductor device in which is used a vertically phase-separated block copolymer layer. A vertically phase-separated block copolymer layer formed by heating at a pressure below atmospheric pressure and a temperature at which induced self-assembly can occur. The vertical phase separation preferably includes a cylinder-shaped portion. The cylinder-shaped portion preferably includes PMMA. The heating temperature is preferably 270°C or higher. It is furthermore preferable to have a layer that neutralizes the surface energy of the block copolymer beneath the block copolymer layer. |
| priorityDate |
2020-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |