abstract |
[Problem] To provide a composition for forming an underlayer film necessary for facilitating the alignment of a self-assembling film into a desired vertical pattern. [Solution] A composition for forming an underlayer film of a self-assembling film including a polymer having a unit structure that includes, in the main chain thereof, an aliphatic polycyclic structure of an aliphatic polycyclic compound. The polymer has a unit structure that includes, in the main chain thereof, an aliphatic polycyclic structure of an aliphatic polycyclic compound, and an aromatic ring structure of an aromatic-ring-containing compound, or a polymer chain derived from a vinyl group of a vinyl-group-containing compound. The polymer has a unit structure represented by formula (1). (In the formula, X is a single-bond, divalent group having, as a polymer chain, a vinyl structure derived from a vinyl-containing compound, or a divalent group having, as a polymer chain, an aromatic-ring-containing structure derived from an aromatic-ring-containing compound, and Y is a divalent group having, as a polymer chain, an aliphatic polycyclic structure derived from an aliphatic polycyclic compound.) The aliphatic polycyclic compound is a 2- to 6-ring diene compound. The aliphatic polycyclic compound is dicyclopentadiene or norbornadiene. |