| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8205ec6ee1cd95eb60a03826535bad97 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F293-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F293-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F297-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F297-00 |
| filingDate |
2021-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bb3457d8bbd4f852c18e804f65cee03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b41b0648d0a03d2954be68236c3403da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31f4f2ba679d44df6020e0a7fab628c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee3e8b084f7299eaac66117d7aa82dce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_878ada85d343014ab0699c2d17a36bfe |
| publicationDate |
2022-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2022039187-A1 |
| titleOfInvention |
Vertically phase-separated block copolymer layer |
| abstract |
The present invention provides: a layer containing a block copolymer in which a microphase-separated structure of the block copolymer has been induced to be perpendicular to a substrate, said process being difficult to perform by means of heating at atmospheric pressure; a method for producing this layer; and a method for producing a semiconductor device in which a vertically phase-separated block copolymer layer is used. A vertically phase-separated block copolymer layer which is formed by means of heating at a pressure below atmospheric pressure and at a temperature at which induced self-assembly can occur. It is preferable that the vertical phase separation comprises a lamellar portion. It is preferable that the lamellar portion comprises PMMA. It is preferable that the heating temperature is 290°C or higher. It is preferable to additionally have a layer, which neutralizes the surface energy of the block copolymer, beneath the block copolymer layer. |
| priorityDate |
2020-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |