http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103187268-B

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filingDate 2012-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2016-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2016-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-103187268-B
titleOfInvention The forming method of carbon silicon oxynitride film
abstract The present invention provides the forming method of a kind of carbon silicon oxynitride film, and it is the forming method of the carbon silicon oxynitride film forming carbon silicon oxynitride film on substrate, and on substrate, stacking silicon carbonitride film and silicon oxynitride film form carbon silicon oxynitride film.
priorityDate 2011-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 33.