Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a37d7a7385924dd55e29ac1e96d1492 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-37 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-921 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-914 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-56 |
filingDate |
2019-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_351f8d0af1125d8e128d31a38d1a3faa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da71fc619887b10aeb136139c911cd94 |
publicationDate |
2019-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2019159851-A1 |
titleOfInvention |
Metal carbide sintered body, and heat-resistant member comprising same for silicon carbide semiconductor production device |
abstract |
[Problem] To provide a metal carbide sintered body that has a high relative density and a superior mechanical strength and that can be produced without conducting sintering under high pressure by hot pressing, HIP, or the like, even when the carbide sintered body is of a metal having a very high melting point. [Means] This carbide sintered body is of at least one metal selected from the group consisting of group 4 elements and group 5 elements in the periodic table, and contains 0.1-10,000 wtppm of elemental Si. |
priorityDate |
2018-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |