| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5ac4607ed53c6b5c867bfc117b0294d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_404050a95f4ce092343da021b9d730ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_64cc445e88fb69df319d7eb6cf774a0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242789508fcc9b52c84a82ac211a6774 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-65 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76849
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76805
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2005-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5cbf3218340603e9e0760c419a2a2f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c21a75c8fec4938d3c52b16644608212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f77cfd1190a88918e6ba7054ee8c6936 |
| publicationDate |
2006-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2006058034-A2 |
| titleOfInvention |
Molecular self-assembly in substrate processing |
| abstract |
Systems and methods for molecular self-assembly are provided. The molecular self-assembly receives a substrate (2010) that includes one or more regions of dielectric material (2020). A molecularly self-assembled layer (2020a) is formed on an exposed surface of the dielectric material. The molecularly self-assembled layer includes material(s) having a molecular characteristic and/or a molecular type that includes one or more of a molecular characteristic and/or a molecular type of a head group of molecules (2102a) of the material, a molecular characteristic and/or a molecular type of a terminal group of molecules (2102c) of the material, and a molecular characteristic and/or a molecular type of a linking group of molecules (2102b) of the material. The molecular characteristics) and molecular type(s) are selected according to at least one pre-specified property of the moleculariy self- assembled layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10629981-B2 |
| priorityDate |
2004-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |