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filingDate 2013-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2014-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2014-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101459222-B1
titleOfInvention Semiconductor device and method of manufacturing the same
abstract In the semiconductor device and the manufacturing method thereof, the step of forming the insulating film used as the passivation film is simplified. A first step of forming a first electrode (15a) on a semiconductor substrate (1) and, on the first semiconductor substrate (1), the has a first viscosity V 1 in the first temperature T 1, the more the first temperature T 1 a higher second temperature T 2 a first viscosity V 1 lower than the second viscosity V 2 to have a second temperature T 2 higher third temperature T 3 a second viscosity higher third viscosity V 3 than V 2 in a more in And a step of curing the insulating material 30 to form the first insulating film 31. The step of forming the first insulating film 31 is a step of forming the insulating material 30, a first heating process and the insulating material 30 to the second viscosity V 2 is heated to the first condition to the second condition a step of the third viscosity V 3, temperature rise in the first condition and the second condition rate Is different from that of the conventional semiconductor device.
priorityDate 2012-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 46.